We demonstrate a novel technique to fabricate desired three-dimensional (3D) periodic structures by holographically assembling multiple one-dimensional (1D) or multiple two-dimensional (2D) structures. Thanks to the high-absorption effect of the used material, we fabricated for each time, by employing a two-beam interference technique, a 1D or a 2D structure with very limited film thickness. By using the same sample and repeating the same fabrication process, i.e., (i) spin coating, (ii) exposure, and (iii) post-exposure bake, we created, layer-by-layer, a 3D structure as desired, without the limitation of the number of layers. This technique allows rapid fabrication of very large and thick 3D photonic crystal template with variable period, flexible design, low cost, and possible introduction of arbitrary defects inside a 3D structure. © 2010 Springer-Verlag.

Lai N.D., Zheng T.S., Do D.B., Lin J.H., Hsu C.C.

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Từ khóa : 2D structures; 3D photonic crystals; 3D Structure; Absorption effects; Assembly techniques; Fabrication process; Flexible designs; Layer-by-layers; Low costs; Novel techniques; Number of layers; Postexposure bake; Rapid fabrication; Three-dimensional (3D); Three-dimensional structure; Two dimensional (2D) structure; Two-beam interference; Variable period; Crystal structure; Fabrication; Photonic crystals; Three dimensional