Microlens arrays (MLAs) were fabricated based on the mass transport effect of SU-8 photoresist by a multiexposure two-beam interference technique. In particular, a direct single-step fabrication process, i.e., without developing, mask, and pattern transferring processes, is demonstrated. The effects of various parameters such as thicknesses, exposure dosage, and angle between two laser beams on MLAs were investigated. Square and hexagonal lattices of microlenses were obtained by controlling rotation angles between different exposures on SU-8 samples. In addition, microlenses with elliptical shape were fabricated by a double exposure at 0° and 60°. Finally, the surface profiles of microlenses in MLAs were characterized by atomic force microscopy. © 2009 Optical Society of America.

Wu C.Y., Chiang T.H., Lai N.D., Do D.B., Hsu C.C.

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Từ khóa : Double exposure; Elliptical shapes; Fabrication process; Hexagonal lattice; Mass transport; Micro-lens arrays; Pattern transferring; Rotation angles; Single-step; SU-8 photoresist; Surface profiles; Two-beam interference; Atomic force microscopy; Fabrication; Laser beam effects; Mass transfer; Microoptics; Optical instrument lenses; Photoresistors; Photoresists; Surface treatment; Microlenses; epoxide; polymer; SU 8 compound; SU-8 compound; article; chemistry; electronics; equipment; equipment design; instrumentation; interferometry; light; optical instrumentation; radiation scattering; refractometry; Epoxy Compounds; Equipment Design; Equipment Failure Analysis; Interferometry; Lenses; Light; Miniaturization; Polymers; Refractometry; Scattering, Radiation