This paper presents a novel sensing microgripper based on silicon-polymer electrothermal actuators and piezoresistive force sensing cantilever beams which can be control1ed by a PID controller to monitor the displacement of the microgripper jaws and also thecontact force between the tips and the grabbed object. © 2008 IEEE.

Phan Huu P., Nguyen V.Q., Chu Duc T., Sarro P.M.

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Từ khóa : Electrostatic actuators; Grippers; Three term control systems; Time varying control systems; Two term control systems; Electro-thermal actuators; Force sensing cantilevers; Microgripper; P-i-d controls; PID controllers; Piezo-resistive; Proportional control systems