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Polymeric thermal microactuator with embedded silicon skeleton: Part I - Design and analysis

This paper presents the modeling of a new design of a polymeric thermal microactuator with an embedded meander-shaped silicon skeleton. The design has a skeleton embedded in a polymer block. The embedded skeleton improves heat transfer to the polymer and reinforces it. In addition, the skeleton laterally constrains the polymer to direct the volumetric thermal expansion of the polymer in the actuation direction. The complex geometry and multiple-material composition of the actuator make its modeling very involved. In this paper, the main focus is on the development of approximate electrothermal and thermoelastic models to capture the essence of the actuator behavior. The approximate models are validated with a fully coupled multiphysics finite element model and with experimental testing. The approximate models can be useful as an inexpensive tool for subsequent design optimization. Evaluation, using the analytical and numerical models, shows that the polymer actuator with the embedded skeleton outperforms its counterpart without a skeleton, which is in terms of heat transfer and, thus, response time, actuation stress, and planarity. [2007-0193]. © 2008 IEEE.


 Lau G.-K., Goosen J.F.L., van Keulen F., Chu Duc T., Sarro P.M.
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  Từ khóa : Actuators; Approximation theory; Cantilever beams; Chlorine compounds; Heat exchangers; Heat transfer; Heating equipment; Microactuators; Nonmetals; Numerical methods; Optimization; Polymers; Silicon; Thermal expansion; Thermal spraying; Thermoanalysis; Actuation stress; Analytical and numerical models; Approximate models; Artificial muscle; Complex geometries; Design and analysis; Design optimization; Experimental testing; Finite element model; Fully coupled; Material compositions; Microelectromechanical systems (MEMS); Multi-physics; Multiphysicsmodeling; New design; Planarity; Polymer actuators; Response time; Silicon skeleton; Thermal actuators; Volumetric thermal expansion; Finite element method