Three layers, NbN based Josephson junction, has been growth by RF and by DC sputtering within the constrain required by the photolithography technology. An interesting superconducting film with critical temperature of Tc = 14 K, well above the temperature of the commercial cryocooler, has been obtained reducing sputtering power and finding a proper N₂ concentration in the gas mixture. The search of the new sputtering parameters has been obtained with the help of electron spectroscopy and X-ray diffraction analysis. © 2007 Elsevier Ltd. All rights reserved.

Lucci M., Thanh H.N., Davoli I.

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Từ khóa : Characterization; Electron spectroscopy; Gas mixtures; Niobium compounds; Photolithography; Sputtering; Superconducting films; X ray diffraction analysis; Critical temperature; Cryocoolers; Sputtering parameters; Josephson junction devices